Laser Applications in Microelectronic and Optoelectronic Manufacturing V

EditorSearch for: Helvajian, H.; Search for: Sugioka, K.; Search for: Gower, M. C.; Search for: Dubowski, J.
TypeArticle
Series titleProceedings of SPIE; Volume 3933
ConferenceSPIE Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing V, January 24, 2000, San Jose, CA, USA
ISBN9780819417497
PublisherSPIE
Linkhttp://spiedigitallibrary.aip.org/dbt/dbt.jsp?KEY=PSISDG&Volume=3933&Issue=1&bproc=volrange&scode=3900+-+3999
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for Chemical Process and Environmental Technology
Peer reviewedNo
NPARC number12346532
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Record identifier4b9fe280-c459-44cf-93ad-c89ed2d0a7c2
Record created2009-09-17
Record modified2016-05-09
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