Very High Density RF MIM Capacitors Compatible with VLSI

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TypeArticle
ConferenceIntl Microwave Symposium, 2005
Pages287290; # of pages: 4
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346698
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Record identifier4e567e27-555e-446b-8e3a-a3b89131a5d3
Record created2009-09-17
Record modified2016-05-09
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