Ultrathin Ta2O5 films produced by large-area pulsed laser deposition

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DOIResolve DOI: http://doi.org/10.1016/S0040-6090(00)00982-2
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TypeArticle
Journal titleThin Solid Films
Volume371
Issue1-2
Pages119125; # of pages: 7
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number12744895
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Record identifier4e70e3e4-c50a-4b2b-91e4-b23dd8f6d849
Record created2009-10-27
Record modified2016-05-09
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