Growth of SiGe/Si:B heterostructures on HF-passivated Si(001) using a commercial UHV-CVD reactor

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TypeArticle
Journal titleMRS
Publication date
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number12329059
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Record identifier4e72c207-8aa8-4b6f-a5ef-d9515eebfda0
Record created2009-09-10
Record modified2016-05-09
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