Watching semiconductor circuitry work

Alternative titleSPIE
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TypeArticle
Volume5969
Pages654661; # of pages: 8
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346502
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Record identifier4eb67a5f-6ca0-448d-8ed4-806d90cd7d8a
Record created2009-09-17
Record modified2016-05-09
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