Structural characterization of a UHV/CVD-grown SiGe HBT with graded base

Download
  1. Get@NRC: Structural characterization of a UHV/CVD-grown SiGe HBT with graded base (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1016/S0040-6090(98)00468-4
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleThin solid films
ISSN0040-6090
Volume321
IssueMay 26,
Pages167171; # of pages: 5
Publication date
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards; NRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
Identifier10276968
NRC number1116
NPARC number8898593
Export citationExport as RIS
Report a correctionReport a correction
Record identifier4f0d1782-7cd9-4b26-b3f7-78d590892779
Record created2009-04-22
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)