Microstructures of reactively sputtered Ti1-xAlxNy films

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ConferenceInternational Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004) From 04/19/2004 To 04/23/2004., San Diego, CA, USA
SubjectMicrostructure; Magnetron sputtering; TiAlN
AffiliationNRC Institute for Aerospace Research; National Research Council Canada
Access conditionavailable
Peer reviewedYes
NRC numberSMPL-2003-0277
NPARC number8927170
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Record identifier500e315b-ef3a-40f2-b80c-4ef55d740bd0
Record created2009-04-23
Record modified2016-05-09
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