Study of optical and electrical properties of ZnO/Cu/ZnO multilayers deposited on flexible substrate

Download
  1. Get@NRC: Study of optical and electrical properties of ZnO/Cu/ZnO multilayers deposited on flexible substrate (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1016/j.tsf.2012.10.064
AuthorSearch for: ; Search for: ; Search for:
TypeArticle
Journal titleThin Solid Films
Volume525
Pages162166; # of pages: 5
SubjectTransparent conducting oxide; multilayer; zinc oxide; copper; flexible substrate; sputtering
AbstractTransparent conducting oxide thin films have been extensively studied because they are essential elements in optoelectronic applications. In this communication, we report transparent conductive ZnO/Cu/ZnO multilayer films prepared by RF sputtering of ZnO and DC sputtering of Cu on flexible polyethylene naphthalate substrates. The optical and electrical properties of the multilayers were studied for different thicknesses of Cu and ZnO layers. Controlling the thickness of the ZnO layer for a specific Cu thickness affects the transmittance of the multilayer. Electrical properties are influenced by the thickness of ZnO and Cu layers. Sheet resistance of the stack rises with the decrease of Cu thickness and the increase of ZnO thickness. Repeated bending of the stack, after an initial 20% increase of sheet resistance, has no significant effect on the electrical performance of the multilayers.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; Automotive; Energy, Mining and Environment
Peer reviewedYes
NRC number140328
NPARC number21268116
Export citationExport as RIS
Report a correctionReport a correction
Record identifier52a62169-83d4-44cd-a441-28362c1493de
Record created2013-04-12
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)