Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry

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DOIResolve DOI: http://doi.org/10.1016/j.mee.2003.09.010
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TypeArticle
Journal titleMicroelectronic Engineering
Volume75
Issue1
Pages3142; # of pages: 12
SubjectDielectrophoresis; Integrated systems; Nano-assembly; Nanometer structures; Sensors
AbstractWe present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on "striped" high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces, allowing their individual assembly and characterization. This assembly also enables the development of "mixed-mode" integrated circuits that include readout, signal processing, and communications circuitry, as well as the requisite layout for the post-IC assembly of the nanostructures. We report on preliminary designs of such mixed mode systems whose layouts integrate dielectrophoretic assembly sites with a rudimentary resistance read-out circuitry.
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AffiliationNational Research Council Canada; National Institute for Nanotechnology
Peer reviewedNo
NPARC number12328216
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Record identifier53700b90-adca-4b3e-b31e-c35d1ff148fb
Record created2009-09-10
Record modified2016-05-09
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