Fabrication of metallic micromolds by laser and electro-discharge micromachining

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DOIResolve DOI: http://doi.org/10.1007/s00542-009-0931-1
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Journal titleMicrosystem Technologies
Pages477485; # of pages: 9
Subjectmicrofluidics; micromold fabrication; laser micromachining; microEDM
AbstractA method of creating metallic micromolds with features that have high-aspect ratios is described in this paper. The proposed manufacturing process utilizes laser micromachining to cut the negative two-dimensional profiles of the desired microfeatures and fluidic network patterns on a 100 μm thick brass sheet. The positive relief of the cut pattern is then created by using electro-discharge micromachining (micro-EDM) die-sinking the metallic mask onto a brass substrate. The final substrate with the desired relief pattern becomes the molding tool used for either elastomer casting or thermoplastic hot embossing. To validate the proposed fabrication methodology and evaluate the quality of surface finishes, a brass mold master of a T-channel micromixer (50 μm width, 25 μm height) is developed and multiple replicated devices are cast on this mold using poly-di-methyl-siloxane (PDMS). The surface finish of both the original micromold master and final molded channels on PDMS are measured using an optical profiler and found to have a roughness of approximately 400 nm Ra. The ability of the proposed fabrication technique to create high-aspect ratio features is illustrated by manufacturing a Y-channel micromixer with an aspect ratio of 4. Experimental results are discussed and suggestions for improvement are presented.
Publication date
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21274361
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Record identifier559616a2-0124-424f-a710-89d15bc0543e
Record created2015-03-11
Record modified2016-05-09
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