Control of the principal refractive indices in biaxial metal oxide films

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DOIResolve DOI: http://doi.org/10.1364/JOSAA.28.001830
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TypeArticle
Journal titleJournal of the Optical Society of America A: Optics and Image Science, and Vision
ISSN1084-7529
Volume28
Issue9
Pages18301840; # of pages: 11
SubjectColumnar thin films; Common materials; Deposition angle; Experimental characterization; Glancing Angle Deposition; In-plane birefringence; Metal oxide film; Metal oxides; Substrate rotation; Unified framework; Birefringence; Deposition; Light refraction; Metallic compounds; Refractive index; Refractometers; Oxide films
AbstractWe provide both an extensive experimental characterization and a model for metal oxide, slanted columnar thin films fabricated using glancing angle deposition. The model is applicable to slanted posts of any type, deposited at a constant deposition angle, with variable azimuthal substrate rotation. The model is capable of predicting the column tilt, principal refractive indices, and in-plane birefringence under a single unified framework, given knowledge of common material parameters. This paper also establishes a number of additional important results, including the occurrence of negative in-plane birefringence and the occurrence of uniaxial films with nonzero columnar tilt. © 2011 Optical Society of America.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology
Peer reviewedYes
NPARC number21271927
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Record identifier56414aae-2121-448a-b494-5a445e00e397
Record created2014-05-06
Record modified2016-05-09
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