Limits to the spatial, energy and momentum resolution of electron energy-loss spectroscopy

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DOIResolve DOI: http://doi.org/10.1016/j.ultramic.2006.11.005
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TypeArticle
Journal titleUltramicroscopy
Volume107
Issue8
Pages575586; # of pages: 12
SubjectEELS; Electron scattering; Fourier optics; Radiation effects; TEM
AbstractWe discuss various factors that determine the performance of electron energy-loss spectroscopy (EELS) and energy-filtered (EFTEM) imaging in a transmission electron microscope. Some of these factors are instrumental and have undergone substantial improvement in recent years, including the development of electron monochromators and aberration correctors. Others, such as radiation damage, delocalization of inelastic scattering and beam broadening in the specimen, derive from basic physics and are likely to remain as limitations. To aid the experimentalist, analytical expressions are given for beam broadening, delocalization length, energy broadening due to core-hole and excited-electron lifetimes, and for the momentum resolution in angle-resolved EELS.
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AffiliationNational Research Council Canada; National Institute for Nanotechnology
Peer reviewedNo
NPARC number12338032
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Record identifier575613ef-034b-410e-af33-65f9b304be9f
Record created2009-09-10
Record modified2016-05-09
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