Depth Sensing Indentation Studies on Thin Films of Si3N4 and SiO2

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TypeOther
AffiliationNRC Institute for Aerospace Research; National Research Council Canada; NRC Institute for Fuel Cell Innovation
Access conditionunclassified/unlimited
Peer reviewedNo
NRC numberSMPL-1995-0050
NPARC number8931068
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Record identifier588fc0ce-8108-42a1-afc1-9e01830d30eb
Record created2009-04-23
Record modified2016-05-09
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