Sub-micron high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector

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DOIResolve DOI: http://doi.org/10.1116/1.1475981
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume20
Issue3
Pages1079
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744810
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Record identifier59f464fb-9fef-4646-ad65-58ec91fe9bc5
Record created2009-10-27
Record modified2016-05-09
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