Growth of vacuum evaporated ultra-porous silicon studied with spectroscopic ellipsometry and scanning electron microscopy

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DOIResolve DOI: http://doi.org/10.1063/1.1823029
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TypeArticle
Journal titleJournal of Applied Physics
Volume97
Issue1
Pages013511
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12743952
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Record identifier5a9dd2ce-c4f3-4375-8b26-d10e7a01d892
Record created2009-10-27
Record modified2016-05-09
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