Structure of GaN thin Films grown by magnetron sputter epitaxy

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DOIResolve DOI: http://doi.org/10.1116/1.581059
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TypeArticle
Journal titleJ. Vacuum Science And Technology A
Series title1998
Volume16
Issue2
Pages786–; # of pages: 1
AffiliationNational Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12327977
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Record identifier5aecf723-2df1-4f38-80b4-e679eeadb626
Record created2009-09-10
Record modified2016-05-09
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