Molecular beam epitaxy synthesis of Si1−yCy and Si1−x−yGexCy alloys and Ge islands using an electron cyclotron resonance argon/methane plasma

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DOIResolve DOI: http://doi.org/10.1016/S0040-6090(02)00241-9
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TypeArticle
Journal titleThin Solid Films
Volume410
Issue1-2
Pages6171; # of pages: 11
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744507
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Record identifier5eea226a-6188-4545-86ad-a76767dc187b
Record created2009-10-27
Record modified2016-05-09
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