X-ray and electrical characterization of optimized Ti/Al/Ti/Au ohmic contacts for AlGaN/GaN HEMTs

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TypeArticle
Proceedings titleECS Transactions
Conference208th ECS Meeting, 16-21 October 2005, Los Angeles, California
Volume1
Issue2
Pages266274; # of pages: 9
Publication date
PublisherECS
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedYes
NPARC number12346239
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Record identifier60ce5016-953e-4bd5-9f91-9ece89e47a80
Record created2009-09-17
Record modified2016-05-09
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