Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices

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DOIResolve DOI: http://doi.org/10.1504/IJMTM.2006.009992
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TypeArticle
Journal titleInternational Journal of Manufacturing Technology and Management
Volume9
Issue1/2
Pages144159; # of pages: 16
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744074
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Record identifier623e99af-518c-4e14-8b3f-f7ac9933342e
Record created2009-10-27
Record modified2016-05-09
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