Nanofabrication using a direct-write electron beam lithography system

AuthorSearch for:
TypeArticle
ConferenceCSTC, August 18-22, 2003
Volume
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346652
Export citationExport as RIS
Report a correctionReport a correction
Record identifier62475e25-dbc8-4a54-a91d-d10e9c42b615
Record created2009-09-17
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)