High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching

Download
  1. (PDF, 864 KB)
  2. Get@NRC: High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1021/acs.nanolett.5b01346
AuthorSearch for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleNano Letters
ISSN1530-6984
1530-6992
Volume15
Issue8
Pages51315136
Subjectdiamond; microcavity; microdisk; nanofabrication; nanophotonics
AbstractOptical microcavities enhance light–matter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamond’s excellent optical and mechanical properties. Light–matter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures, we create monolithic diamond microdisks. Fiber taper based measurements show that these devices support TE- and TM-like optical modes with Q > 1.1 × 105 and V < 11(λ/n) 3 at a wavelength of 1.5 μm.
Publication date
PublisherAmerican Chemical Society
LanguageEnglish
AffiliationNational Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NPARC number23001495
Export citationExport as RIS
Report a correctionReport a correction
Record identifier65852c4c-ce37-4aff-a42f-101c402dccf7
Record created2017-02-20
Record modified2017-02-20
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)