High performance HFET devices on sahire and SiC: Passivation with AlN

Alternative titleMat Res Soc
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TypeArticle
Volume743
PagesL961
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12346336
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Record identifier66c526f7-fdce-429f-8b11-586745175900
Record created2009-09-17
Record modified2016-05-09
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