Microstructured Humidity Sensors Fabricated by Glancing Angle Deposition: Characterization and Performance Evaluation

TypeArticle
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number425
NPARC number8926563
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Record identifier68b7175c-5633-4df4-8222-19c5deb03e73
Record created2009-04-23
Record modified2016-05-09
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