Fabrication of a New Cold Cathode Based on Pulsed Laser Deposition of Lanthanum Monosulfide Thin Films

DOIResolve DOI: http://doi.org/10.1109/NANO.2006.247697
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EditorSearch for: Bandyopadhyay, S.; Search for: Cahay, M.
TypeArticle
Proceedings titleTechnical Digest of the 6th IEEE Conference on Nanotechnology
Conference6th IEEE Conference on Nanotechnology, June 17-20, 2006
ISBN1-4244-0077-5
VolumeS08P23
Pages500503; # of pages: 4
AbstractField emission properties of lanthanum monosulfide (LaS) thin films deposited by pulsed laser deposition (PLD) have been measured by building an array of new cold cathodes based on MEMS technology. The new cold cathode array has been fabricated by a sequence of steps on two separate (100) Si wafers, which in the final stage were bonded together with a high temperature, non-degasable expoxy.
Publication date
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
IdentifierIEEE Cat 06TH8861C
NPARC number12346276
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Record identifier6ab24990-5acb-4e85-a80e-c4ae2c7e33d9
Record created2009-09-17
Record modified2016-05-09
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