Deep submicron LOCOS-defined SOI photonic wire waveguides

Download
  1. Get@NRC: Deep submicron LOCOS-defined SOI photonic wire waveguides (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1109/GROUP4.2011.6053779
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Proceedings titleIEEE International Conference on Group IV Photonics GFP
Conference8th IEEE International Conference on Group IV Photonics, GFP 2011, 14 September 2011 through 16 September 2011, London
ISSN1949-2081
ISBN9781424483389
Article number6053779
Pages249251; # of pages: 3
SubjectDeep sub-micron; LOCOS; Low loss; photonic wire; Photonic wire waveguides; Photonic wires; SOI waveguides; Jitter; Photonics; Waveguides; Wire; Optical waveguides
AbstractThe LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process. © 2011 IEEE.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC)
Peer reviewedYes
NPARC number21271751
Export citationExport as RIS
Report a correctionReport a correction
Record identifier6bd12188-0078-44ac-9f97-fd334027242c
Record created2014-03-24
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)