Plasma deposition of optical films and coatings: A review

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DOIResolve DOI: http://doi.org/10.1116/1.1314395
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume18
Issue6
Pages26192645; # of pages: 27
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744247
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Record identifier6bde0369-6ceb-49ab-8d67-0186b4e0173b
Record created2009-10-27
Record modified2016-05-09
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