Determination of the thickness of thin anodic oxides on GaAs using AFM, profilometry, TEM, XPS and SIMS

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TypeArticle
Proceedings titleMicroscopy of oxidation 3: Proceedings of the Third International Conference on the Microscopy of Oxidation
ConferenceProceedings of the 3rd International Conference on the Microscopy of Oxidation, 16-18 September 1996, held at Trinity Hall, the University of Cambridge, UK
ISBN1-86125-034-7
Publication date
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number12327648
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Record identifier6c29fe2c-5be3-4874-bf1e-5ed2e91ebc5a
Record created2009-09-10
Record modified2016-05-09
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