Integration of Advanced Micro- and Nanoelectronic Devices—Critical and Solutions

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TypeBook Chapter
Book titleMaterials Research Society Symposium Proceedings
Volume8111
PublisherMaterials Research Society
PlaceWarrendale, Pennsylvania
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346587
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Record identifier6d4d149c-501f-4fb8-9b53-630fb6b51afe
Record created2009-09-17
Record modified2016-05-09
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