Thickness and density evaluation for nanostructured thin films by glancing angle deposition

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DOIResolve DOI: http://doi.org/10.1116/1.2131079
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TypeArticle
Journal titleJournal of Vacuum Science & Technology B
Volume23
Issue6
Pages25452552; # of pages: 8
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12743771
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Record identifier6e7de59d-2ce7-46cd-8ac4-431d83f19b90
Record created2009-10-27
Record modified2016-05-09
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