Electrical isolation of electrodes with submicron separation in a digital optical switch

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DOIResolve DOI: http://doi.org/10.1116/1.2167976
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume24
Pages807811; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12743970
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Record identifier6f0354b5-643c-4c49-b9fb-0f8c0950c5f2
Record created2009-10-27
Record modified2016-05-09
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