Room temperature deposition of ITO using r.f. magnetron sputtering

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DOIResolve DOI: http://doi.org/10.1016/S0040-6090(02)00425-X
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TypeArticle
Journal titleThin Solid Films
Volume413
Issue1-2
Pages181185; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744715
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Record identifier6f37ef24-058a-4252-a589-d1f81cdd172d
Record created2009-10-27
Record modified2016-05-09
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