Improved High-Temperature Leakage in High-Density MIM Capacitors by Using a TiLaO Dielectric and an Ir Electrode

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DOIResolve DOI: http://doi.org/10.1109/LED.2007.909612
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TypeArticle
Journal titleIEEE Electron Device Letters
Volume28
Issue12
Pages10951097; # of pages: 3
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744338
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Record identifier733bb21c-fb79-4b23-a4c7-e87b07188726
Record created2009-10-27
Record modified2016-05-09
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