Femtosecond lasers and their implications for materials processing

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DOIResolve DOI: http://doi.org/10.1117/12.309498
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TypeArticle
Proceedings titleSPIE - International Society for Optical Engineering. Proceedings
ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing V, 26 January 1998 through 28 January 1998, San Jose, CA
ISSN0277-786X
Volume3274
Pages1017; # of pages: 8
SubjectLaser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers
AbstractAs a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of-the-art in femtosecond laser technology of interest to micro machining.
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LanguageEnglish
AffiliationNational Research Council Canada
Peer reviewedYes
NPARC number21276185
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Record identifier74a61c28-296c-4be1-8dbb-910f050b4e1e
Record created2015-09-28
Record modified2017-04-24
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