Impact of plasma-sprayed particles on textured silicon wafers

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TypeArticle
Proceedings titleProceedings of the 20th Annual Conference on Liquid Atomization and Spray Systems(ILASS-Americas), 2007
ConferenceThe 20th Annual Conference on Liquid Atomization and Spray Systems(ILASS-Americas), Chicago, Illinois, May 15-18, 2007
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedYes
NRC number49401
NPARC number15795082
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Record identifier752701b5-3448-4412-92de-e94eccbe7ce3
Record created2010-07-09
Record modified2016-05-09
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