Physics and Technology of High-k Gate Dielectrics 4

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TypeBook Chapter
Book titleECS transactions
Volume3
Issue3
PublisherThe Electrochemical Society
PlacePennington, NJ
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346640
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Record identifier770d6c16-0e41-4250-984b-a2c284c18118
Record created2009-09-17
Record modified2016-05-09
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