Silicon containing organic-inorganic hybrid materials as EUV photoresists

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TypeArticle
Journal titleJ. Photopolymer Sci. Tech.
Volume18
Issue4
Pages4817; # of pages: 475
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number83
NPARC number8926414
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Record identifier77b15b94-9957-493f-81cd-fb416cfb9e33
Record created2009-04-23
Record modified2016-05-09
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