Calibration specimens for determining energy-dispersive X-ray k-factors of boron, nitrogen, oxygen, and fluorine

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DOIResolve DOI: http://doi.org/10.1017/S1431927699000021
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TypeArticle
Journal titleMicroscopy and Microanalysis
Volume5
Issue1
Pages2938; # of pages: 10
AbstractWe have fabricated amorphous thin-film specimens containing light elements (B, C, N, O, F, and Mg) in addition to silicon, and have measured their composition using electron energy-loss spectroscopy (EELS). The films appear to be stable during storage in air and during irradiation by an electron beam, for doses below 105 C/cm2. Used with a transmission electron microscope fitted with an energy-dispersive X-ray (EDX) detector, they provide a convenient means of determining light-element k-factors for X-ray microanalysis. For a TEM equipped with an electron energy-loss spectrometer, the specimens can also be used to check the EELS instrumentation and elemental-quantification procedures.
Publication date
PublisherCambridge University Press
LanguageEnglish
Peer reviewedYes
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NPARC number21268186
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Record identifier7af48be6-3c1c-4f24-9fa6-ceadda187c13
Record created2013-05-24
Record modified2016-05-09
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