Investigation of the contamination at the substrate-epilayer interface for epi-ready substrates

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TypeTechnical Report
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12745799
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Record identifier7ca79f6f-3c2e-4e97-9b98-652c60e122f7
Record created2009-10-28
Record modified2016-10-03
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