High-kƒnIr/TiTaO/TaN Capacitors Suitable for Analog IC Applications

Download
  1. Get@NRC: High-kƒnIr/TiTaO/TaN Capacitors Suitable for Analog IC Applications (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1109/LED.2005.851241
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleIEEE Electron Device Letters
Volume26
Issue7
Pages504506; # of pages: 3
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744710
Export citationExport as RIS
Report a correctionReport a correction
Record identifier7d34eae6-33b3-4698-8635-9ca6fb469c14
Record created2009-10-27
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)