Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft X-ray radiation

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DOIResolve DOI: http://doi.org/10.1038/srep20658
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TypeArticle
Journal titleScientific Reports
ISSN2045-2322
Volume6
Article number20658
AbstractOptical coherence tomography (OCT) is a non-invasive technique for cross-sectional imaging. It is particularly advantageous for applications where conventional microscopy is not able to image deeper layers of samples in a reasonable time, e.g. in fast moving, deeper lying structures. However, at infrared and optical wavelengths, which are commonly used, the axial resolution of OCT is limited to about 1 Î 1/4m, even if the bandwidth of the light covers a wide spectral range. Here, we present extreme ultraviolet coherence tomography (XCT) and thus introduce a new technique for non-invasive cross-sectional imaging of nanometer structures. XCT exploits the nanometerscale coherence lengths corresponding to the spectral transmission windows of, e.g., silicon samples. The axial resolution of coherence tomography is thus improved from micrometers to a few nanometers. Tomographic imaging with an axial resolution better than 18 nm is demonstrated for layer-type nanostructures buried in a silicon substrate. Using wavelengths in the water transmission window, nanometer-scale layers of platinum are retrieved with a resolution better than 8 nm. XCT as a nondestructive method for sub-surface tomographic imaging holds promise for several applications in semiconductor metrology and imaging in the water window.
Publication date
PublisherNature Publishing Group
LanguageEnglish
AffiliationNational Research Council Canada; NRC Steacie Institute for Molecular Sciences; Security and Disruptive Technologies
Peer reviewedYes
NPARC number21277437
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Record identifier7dd51cbd-1dd6-4691-b0fb-fca4756da5e1
Record created2016-03-09
Record modified2016-05-09
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