Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. % Mo amorphous-nanocrystalline metallic composites

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TypeArticle
Journal titleApplied Physics Letters
Volume92
Issue12
PagesArt #123108
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number470
NPARC number8926509
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Record identifier7fcc632a-93ca-4cf8-aeb5-fe88adb07eb7
Record created2009-04-23
Record modified2016-05-09
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