Cross-sectional resist profiles of dense nanoscale gratings and individual lines from electron beam lithography

TypeArticle
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number480
NPARC number8926100
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Record identifier81042d9f-6925-4f66-a25d-4d2b5be67392
Record created2009-04-23
Record modified2016-05-09
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