The equilibria in the AlN-Al2O3-Y2O3 system - thermodynamics and neutron diffraction

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DOIResolve DOI: http://doi.org/10.1007/s003390201872
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TypeArticle
Journal titleApplied Physics A: Materials Science & Processing
Volume74
Issue0
Pagess1188-s1191
AbstractThe importance of aluminum nitride (AlN) stems from its application in microelectronics as a substrate material. Yttria (Y2O3) is the best additive for AlN sintering, and it has been shown that AlN densifies by a liquid-phase mechanism, where the surface oxide, Al2O3, reacts with the oxide additive, Y2O3, to form a Y-Al-O-N liquid that promotes particle rearrangement and densification. Construction of the phase relations in this multicomponent system is becoming essential for further development of AlN. The ternary phase diagram of AlN-Al2O3-Y2O3 was thermodynamically modeled and verified experimentally using in situ high-temperature neutron diffractometry. The ternary phase diagram of AlN-Al2O3-Y2O3 has been constructed for the first time in this work.
Publication date
AffiliationNational Research Council Canada; NRC Canadian Neutron Beam Centre
Peer reviewedNo
NPARC number12337951
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Record identifier812f16e0-1db4-4f56-a2e6-cd84b311d14d
Record created2009-09-10
Record modified2016-05-09
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