Novel lateral cavity MSM photodetectors on SOI substrates using silicides in Silicon-based and hybrid optoelectronics

Alternative titleSPIE
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TypeArticle
ConferenceSPIE Photonics West, 2001, San Jose, CA
Volume
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346182
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Record identifier81e395a3-d7df-4c1f-bf41-10bd83f96fc3
Record created2009-09-17
Record modified2016-05-09
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