Matrix effects in sims depth profiles of SiGe superlattices

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DOIResolve DOI: http://doi.org/10.1016/0168-583X(90)90907-C
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TypeArticle
ConferenceIon beam analysis : proceedings of the Ninth International Conference on Ion Beam Analysis, June 26-30, 1989, Kingston, Ontario, Canada
ISSN0168-583X
Volume45
IssueJanuary 2,
Pages592596; # of pages: 5
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards; NRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NRC number4347
NPARC number8896706
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Record identifier82439d9f-fbfb-4556-acea-a9b4f45d72f4
Record created2009-04-22
Record modified2016-05-09
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