Imaging laser diffractometer for traceable grating pitch calibration

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DOIResolve DOI: http://doi.org/10.1088/0957-0233/18/2/S08
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TypeArticle
Journal titleMeasurement science and technology
ISSN0957-0233
Volume18
IssueFebruary 2
Pages375383; # of pages: 9
Publication date
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards
Peer reviewedNo
Identifier10466824
NRC number4040
NPARC number8900416
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Record identifier88041e7b-c9be-4a05-92f5-af5b15f213c2
Record created2009-04-22
Record modified2016-05-09
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