A UHV deposition/reflectometer system for the deposition and characterization of XUV multilayer mirrors

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TypeThesis
PublisherUniversité du Québec, INRS
AffiliationNational Research Council Canada
Peer reviewedNo
NPARC number12339150
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Record identifier891973f1-cc4f-49e4-a7e4-3171835f0ef4
Record created2009-09-11
Record modified2016-05-09
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