Silicides for ULSI technology

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TypeArticle
Journal titlePhysics in Canada
Volume52
Issue5
Pages227230; # of pages: 4
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12339283
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Record identifier8b6827ec-915c-46bf-a60b-920bc41ee517
Record created2009-09-11
Record modified2016-05-09
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