Production of 70-nm Cr dots by laser-induced forward transfer

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DOIResolve DOI: http://doi.org/10.1364/OE.21.018525
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TypeArticle
Journal titleOptics Express
ISSN1094-4087
Volume21
Issue15
Pages1852518531; # of pages: 7
SubjectAblation thresholds; Continuous films; Incident laser; Laser-induced forward transfer; Production of; Spot sizes; Sub-100 nm; Ultra-thin; Film thickness; Mass transfer; Ultrathin films
AbstractThe effect of donor film thickness and laser beam fluence on the size of laser-induced forward transfer (LIFT) spots is studied to achieve sub-100 nm features. A 130 fs, 800 nm laser is focused on ultrathin Cr films, and the transfer and ablation thresholds of these films at various thicknesses are determined. The minimum transfer spot size decreases with decreasing donor film thickness and incident laser fluence. Minimum LIFT spots of 70-450 nm diameter are obtained from films of 20-80 nm thickness, respectively. The 70 nm diameter transfer spots obtained from sputtered continuous films are the smallest to date. © 2013 Optical Society of America.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); Security and Disruptive Technologies
Peer reviewedYes
NPARC number21271845
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Record identifier8da14c93-7607-4c27-8867-27ad3bca659a
Record created2014-04-23
Record modified2016-05-09
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