Glancing Angle Deposition: Fabrication, Properties and Applications of Micro and Nanostructured Thin Films

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TypeArticle
Journal titleJ. Vacuum Science and Technology A
Volume25
Issue5
Pages13171335; # of pages: 19
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number417
NPARC number8926570
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Record identifier94513ae8-7dbe-49e7-8e41-b05315106115
Record created2009-04-23
Record modified2016-05-09
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